Mechanical behavior of surface-patterned and coated Si or Ge wafers for superhydrophobic and antireflective light transmitting windows

The compressive resistance of truncated nanocone lattices produced by lithography and etching steps on Si or Ge wafers to get superhydrophobic antireflective light-transmitting windows, as well the protection efficiency alumina diamond coatings, is investigated numerical simulations elastic buckling, nanocompression tests. latter reveal limits an analysis, since stress at top cones high enough trigger plastic flow, phase changes. nano-cones exhibit a large ductility in compression even seem creep room temperature. Thin coatings are, however, shown provide effective against both buckling flow. Surface patterning induce concentrations foot cones, which reduces fracture substrate biaxial bending.